Experimental measurements and numerical simulations of the gas composition in a hot‐filament‐assisted diamond chemical‐vapor‐deposition reactor

Mark C. McMaster; Wen L. Hsu; Michael E. Coltrin; David S. Dandy

doi:10.1063/1.358525

Experimental measurements and numerical simulations of the gas composition in a hot‐filament‐assisted diamond chemical‐vapor‐deposition reactor

Journal of Applied Physics ◽

10.1063/1.358525 ◽

1994 ◽

Vol 76 (11) ◽

pp. 7567-7577 ◽

Cited By ~ 44

Author(s):

Mark C. McMaster ◽

Wen L. Hsu ◽

Michael E. Coltrin ◽

David S. Dandy

Keyword(s):

Chemical Vapor Deposition ◽

Numerical Simulations ◽

Vapor Deposition ◽

Chemical Vapor ◽

Experimental Measurements ◽

Gas Composition ◽

Chemical Vapor Deposition Reactor ◽

Hot Filament ◽

Diamond Chemical Vapor Deposition

Download Full-text

Influence of gas composition on wafer temperature in a tungsten chemical vapor deposition reactor: Experimental measurements, model development, and parameter identification

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1333076 ◽

2001 ◽

Vol 19 (1) ◽

pp. 230 ◽

Cited By ~ 11

Author(s):

Hsiao-Yung Chang ◽

Raymond A. Adomaitis ◽

John N. Kidder ◽

Gary W. Rubloff

Keyword(s):

Chemical Vapor Deposition ◽

Parameter Identification ◽

Vapor Deposition ◽

Model Development ◽

Chemical Vapor ◽

Experimental Measurements ◽

Gas Composition ◽

Wafer Temperature ◽

Chemical Vapor Deposition Reactor

Download Full-text

Dependence of the gas composition in a microwave plasma-assisted diamond chemical vapor deposition reactor on the inlet carbon source: CH4 versus C2H2

Diamond and Related Materials ◽

10.1016/0925-9635(95)00270-7 ◽

1995 ◽

Vol 4 (7) ◽

pp. 1000-1008 ◽

Cited By ~ 49

Author(s):

Mark C. McMaster ◽

Wen L. Hsu ◽

Michael E. Coltrin ◽

David S. Dandy ◽

Ciaran Fox

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Source ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Gas Composition ◽

Chemical Vapor Deposition Reactor ◽

Diamond Chemical Vapor Deposition

Download Full-text

Optimizing the gas phase chemistry in a d.c. arcjet diamond chemical vapor deposition reactor

Thin Solid Films ◽

10.1016/0040-6090(94)90302-6 ◽

1994 ◽

Vol 253 (1-2) ◽

pp. 103-108 ◽

Cited By ~ 4

Author(s):

Scott W. Reeve ◽

Wayne A. Weimer

Keyword(s):

Chemical Vapor Deposition ◽

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Gas Phase Chemistry ◽

Phase Chemistry ◽

Diamond Chemical Vapor Deposition

Download Full-text

Study of microwave discharge at high power density conditions in diamond chemical vapor deposition reactor by optical emission spectroscopy

Diamond and Related Materials ◽

10.1016/j.diamond.2019.04.030 ◽

2019 ◽

Vol 97 ◽

pp. 107407 ◽

Cited By ~ 4

Author(s):

S.A. Bogdanov ◽

A.M. Gorbachev ◽

A.L. Vikharev ◽

D.B. Radishev ◽

M.A. Lobaev

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Discharge ◽

Chemical Vapor ◽

Optical Emission ◽

High Power Density ◽

Chemical Vapor Deposition Reactor ◽

Diamond Chemical Vapor Deposition

Download Full-text

Low-temperature deposition of diamond using chloromethane in a hot-filament chemical vapor deposition reactor

Diamond and Related Materials ◽

10.1016/0925-9635(93)90084-f ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 365-372 ◽

Cited By ~ 31

Author(s):

Franklin Chau-Nan Hong ◽

Jing-Chuang Hsieh ◽

Jih-Jen Wu ◽

Gou-Tsau Liang ◽

Jen-Haw Hwang

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Hot Filament

Download Full-text

Large-area bilayer graphene synthesis in the hot filament chemical vapor deposition reactor

Diamond and Related Materials ◽

10.1016/j.diamond.2014.11.001 ◽

2015 ◽

Vol 51 ◽

pp. 34-38 ◽

Cited By ~ 16

Author(s):

Frank Mendoza ◽

Tej B. Limbu ◽

Brad R. Weiner ◽

Gerardo Morell

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Bilayer Graphene ◽

Large Area ◽

Chemical Vapor Deposition Reactor ◽

Graphene Synthesis ◽

Hot Filament

Download Full-text

Direct monitoring of CH3in a filament‐assisted diamond chemical vapor deposition reactor

Journal of Applied Physics ◽

10.1063/1.351019 ◽

1992 ◽

Vol 71 (6) ◽

pp. 2877-2883 ◽

Cited By ~ 70

Author(s):

F. G. Celii ◽

J. E. Butler

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Diamond Chemical Vapor Deposition

Download Full-text

Investigation of conditions for preparation of oriented nanotubes at department of microelectronics in a modified plasma-enhanced hot filament chemical vapor deposition reactor

Physica E Low-dimensional Systems and Nanostructures ◽

10.1016/j.physe.2007.10.099 ◽

2008 ◽

Vol 40 (7) ◽

pp. 2247-2251 ◽

Cited By ~ 1

Author(s):

Peter Vinduska ◽

Jan Janik ◽

Dalibor Buc

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Hot Filament

Download Full-text

Gas temperature in a hot filament diamond chemical vapor deposition system

Review of Scientific Instruments ◽

10.1063/1.1146886 ◽

1996 ◽

Vol 67 (4) ◽

pp. 1546-1554 ◽

Cited By ~ 8

Author(s):

K. L. Menningen ◽

M. A. Childs ◽

L. W. Anderson ◽

J. E. Lawler

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Gas Temperature ◽

Hot Filament ◽

Diamond Chemical Vapor Deposition

Download Full-text

Gas phase generation of diamond nanoparticles in the hot filament chemical vapor deposition reactor

Carbon ◽

10.1016/j.carbon.2016.05.035 ◽

2016 ◽

Vol 106 ◽

pp. 289-294 ◽

Cited By ~ 15

Author(s):

Jin-Woo Park ◽

Kun-Su Kim ◽

Nong-Moon Hwang

Keyword(s):

Chemical Vapor Deposition ◽

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Diamond Nanoparticles ◽

Hot Filament

Download Full-text