Improved interface properties of Ge metal-oxide-semiconductor capacitor with TaTiO gate dielectric by using in situ TaON passivation interlayer

2011 ◽  
Vol 98 (18) ◽  
pp. 182901 ◽  
Author(s):  
F. Ji ◽  
J. P. Xu ◽  
J. G. Liu ◽  
C. X. Li ◽  
P. T. Lai
2007 ◽  
Vol 91 (9) ◽  
pp. 093509 ◽  
Author(s):  
N. Goel ◽  
P. Majhi ◽  
W. Tsai ◽  
M. Warusawithana ◽  
D. G. Schlom ◽  
...  

2016 ◽  
Vol 9 (12) ◽  
pp. 121002 ◽  
Author(s):  
Kexiong Zhang ◽  
Meiyong Liao ◽  
Masataka Imura ◽  
Toshihide Nabatame ◽  
Akihiko Ohi ◽  
...  

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