Finite element modeling of atomic force microscopy cantilever dynamics during video rate imaging

2011 ◽  
Vol 109 (7) ◽  
pp. 074309 ◽  
Author(s):  
J. P. Howard-Knight ◽  
J. K. Hobbs
Keyword(s):  
Atomic Force Microscopy ◽  
Finite Element ◽  
Finite Element Modeling ◽  
Force Microscopy ◽  
Element Modeling ◽  
Atomic Force ◽  
Atomic Force Microscopy Cantilever

Finite Element Modeling of Nanoindentation Measurements of Crystalline and Amorphous Si

2000 ◽  
Vol 649 ◽  
Author(s):  
J. A. Knapp ◽  
D. M. Follstaedt ◽  
S. M. Myers ◽  
G. A. Petersen
Keyword(s):  
Mechanical Properties ◽  
Finite Element ◽  
Finite Element Modeling ◽  
Yield Criterion ◽  
Phase Changes ◽  
Element Modeling ◽  
Atomic Force ◽  
Nanoindentation Testing ◽  
Amorphous Si ◽  
Indentation Measurement

ABSTRACTNanoindentation testing of amorphous Si layers, formed by self-ion implantation, has been performed, and their mechanical properties compared to crystalline Si. The data was analyzed using finite element modeling of the indentation measurement, allowing the properties of the thin amorphous layers to be separated from those of the underlying material. By modeling the materials as isotropic, elastic-plastic solids with the Mises yield criterion, the amorphous Si is shown to have a hardness about 15% lower than crystalline Si and an elastic modulus about 10% lower. Electron and atomic force microscopies of the indents indicate that the amorphous Si does not undergo phase changes during indentation, and that it may be somewhat more ductile than crystalline Si.

scholarly journals Detection of atomic force microscopy cantilever displacement with a transmitted electron beam

2016 ◽  
Vol 109 (4) ◽  
pp. 043111 ◽  
Author(s):  
R. Wagner ◽  
T. J. Woehl ◽  
R. R. Keller ◽  
J. P. Killgore
Keyword(s):  
Atomic Force Microscopy ◽  
Electron Beam ◽  
Force Microscopy ◽  
Atomic Force ◽  
Atomic Force Microscopy Cantilever

scholarly journals Finite element analysis of V-shaped cantilevers for atomic force microscopy under normal and lateral force loads

2006 ◽  
Vol 38 (6) ◽  
pp. 1090-1095 ◽  
Author(s):  
Matthias Müller ◽  
Thomas Schimmel ◽  
Pascal Häußler ◽  
Heiko Fettig ◽  
Ottmar Müller ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Atomic Force Microscopy ◽  
Finite Element ◽  
Lateral Force ◽  
Element Analysis ◽  
Force Microscopy ◽  
Atomic Force
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