Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge

2011 ◽  
Vol 82 (3) ◽  
pp. 033511 ◽  
Author(s):  
Zhongzhen Wu ◽  
Xiubo Tian ◽  
Jingwei Shi ◽  
Zeming Wang ◽  
Chunzhi Gong ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Power ◽  
Magnetron Discharge ◽  
Plasma Immersion Ion Implantation ◽  
Pulsed Magnetron

Experimental study of a pre-ionized high power pulsed magnetron discharge

2007 ◽  
Vol 16 (3) ◽  
pp. 501-510 ◽  
Author(s):  
P Vašina ◽  
M Meško ◽  
J C Imbert ◽  
M Ganciu ◽  
C Boisse-Laporte ◽  
...  
Keyword(s):  
Experimental Study ◽  
High Power ◽  
Magnetron Discharge ◽  
Pulsed Magnetron

Spatial electron density distribution in a high-power pulsed magnetron discharge

2005 ◽  
Vol 33 (2) ◽  
pp. 346-347 ◽  
Author(s):  
J. Bohlmark ◽  
J.T. Gudmundsson ◽  
J. Alami ◽  
M. Latteman ◽  
U. Helmersson
Keyword(s):  
Density Distribution ◽  
Electron Density ◽  
High Power ◽  
Electron Density Distribution ◽  
Magnetron Discharge ◽  
Pulsed Magnetron

Reduction of transient regime in fast preionized high-power pulsed-magnetron discharge

2005 ◽  
Vol 72 (3) ◽  
pp. 390-395 ◽  
Author(s):  
P Vašina ◽  
M Meško ◽  
M Ganciu ◽  
J Bretagne ◽  
C Boisse-Laporte ◽  
...  
Keyword(s):  
High Power ◽  
Transient Regime ◽  
Magnetron Discharge ◽  
Pulsed Magnetron

Erratum to “Spatial Electron Density Distribution in a High-Power Pulsed Magnetron Discharge”

2005 ◽  
Vol 33 (3) ◽  
pp. 1129-1129 ◽  
Author(s):  
J. Bohlmark ◽  
J.T. Gudmundsson ◽  
J. Alami ◽  
M. Lattem ◽  
U. Helmersson
Keyword(s):  
Density Distribution ◽  
Electron Density ◽  
High Power ◽  
Electron Density Distribution ◽  
Magnetron Discharge ◽  
Pulsed Magnetron
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