Furnace formation of silicon oxynitride thin dielectrics in nitrous oxide (N2O): The role of nitric oxide (NO)
1956 ◽
Vol 25
(1)
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pp. 106-115
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2013 ◽
Vol 446
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pp. 332-340
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2001 ◽
Vol 183
(8)
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pp. 2516-2526
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2003 ◽
Vol 306
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pp. 484-489
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Keyword(s):
1997 ◽
Vol 125
(1-6)
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pp. 159-180
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Keyword(s):
Keyword(s):
2003 ◽
Vol 10
(5)
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pp. 275-282
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1998 ◽
Vol 5
(1)
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pp. 115A-115A