High quality tensile-strained n-doped germanium thin films grown on InGaAs buffer layers by metal-organic chemical vapor deposition

R. Jakomin; M. de Kersauson; M. El Kurdi; L. Largeau; O. Mauguin; G. Beaudoin; S. Sauvage; R. Ossikovski; G. Ndong; M. Chaigneau; I. Sagnes; P. Boucaud

doi:10.1063/1.3559231

High quality tensile-strained n-doped germanium thin films grown on InGaAs buffer layers by metal-organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3559231 ◽

2011 ◽

Vol 98 (9) ◽

pp. 091901 ◽

Cited By ~ 52

Author(s):

R. Jakomin ◽

M. de Kersauson ◽

M. El Kurdi ◽

L. Largeau ◽

O. Mauguin ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Buffer Layers ◽

Organic Chemical ◽

High Quality ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Preparation of high quality RuO2 electrodes for high dielectric thin films by low pressure metal organic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581419 ◽

1998 ◽

Vol 16 (5) ◽

pp. 2768-2771 ◽

Cited By ~ 44

Author(s):

Jong Myeong Lee ◽

Ju Cheol Shin ◽

Cheol Seong Hwang ◽

Hyeong Joon Kim ◽

Chang-Gil Suk

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

High Quality ◽

Dielectric Thin Films ◽

Metal Organic ◽

High Dielectric ◽

Organic Chemical Vapor Deposition

Download Full-text

Fabrication of high-quality YBaCuO thin films by plasma-enhanced metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/0040-6090(91)90404-l ◽

1991 ◽

Vol 206 (1-2) ◽

pp. 122-124 ◽

Cited By ~ 8

Author(s):

J. Zhao ◽

P. Norris

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

High Quality ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Versatility of metal organic chemical vapor deposition process for fabrication of high-quality YBCO superconducting thin films

10.1117/12.25756 ◽

1991 ◽

Cited By ~ 1

Author(s):

Chyi S. Chern ◽

Jing-Fu Zhao ◽

Y. Q. Li ◽

Peter E. Norris ◽

B. H. Kear ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Superconducting Thin Films ◽

High Quality ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Materials Science and Engineering B ◽

10.1016/j.mseb.2004.01.012 ◽

2004 ◽

Vol 110 (1) ◽

pp. 34-37 ◽

Cited By ~ 47

Author(s):

Hyoun Woo Kim ◽

Nam Ho Kim

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gallium Oxide ◽

Chemical Vapor ◽

Organic Chemical ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Domain structure of epitaxial PbTiO3 thin films on LaAlO3(100) grown by metal organic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.369203 ◽

1999 ◽

Vol 85 (2) ◽

pp. 853-860 ◽

Cited By ~ 12

Author(s):

Bi Ming Yen ◽

Haydn Chen

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Domain Structure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2006.08.030 ◽

2007 ◽

Vol 515 (5) ◽

pp. 2921-2925 ◽

Cited By ~ 27

Author(s):

Chunyu Wang ◽

Volker Cimalla ◽

Genady Cherkashinin ◽

Henry Romanus ◽

Majdeddin Ali ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Indium Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Transparent Conducting ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Study on ZrO2:Er Thin Films Fabricated by Metal-Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.2839 ◽

2003 ◽

Vol 42 (Part 1, No. 5A) ◽

pp. 2839-2842 ◽

Cited By ~ 2

Author(s):

Jeong Hoon Park ◽

Kug Sun Hong ◽

Woon Jo Cho ◽

Jang-Hoon Chung

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal–Organic Chemical Vapor Deposition

ACS Nano ◽

10.1021/acsnano.1c00811 ◽

2021 ◽

Author(s):

Minsoo Kang ◽

Hyun-Jun Chai ◽

Han Beom Jeong ◽

Cheolmin Park ◽

In-young Jung ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

High Quality ◽

Layered Semiconductors ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

High-quality ZnO films grown by atmospheric pressure metal– organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2005.05.040 ◽

2005 ◽

Vol 283 (1-2) ◽

pp. 87-92 ◽

Cited By ~ 22

Author(s):

Li Wang ◽

Yong Pu ◽

Wenqing Fang ◽

Jiangnan Dai ◽

Yufeng Chen ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Organic Chemical ◽

Zno Films ◽

High Quality ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Crack-free high quality 2 μm-thick Al0.5Ga0.5N grown on a Si substrate with a superlattice transition layer

CrystEngComm ◽

10.1039/c9ce01677e ◽

2020 ◽

Vol 22 (7) ◽

pp. 1160-1165 ◽

Cited By ~ 1

Author(s):

Yingnan Huang ◽

Jianxun Liu ◽

Xiujian Sun ◽

Xiaoning Zhan ◽

Qian Sun ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Transition Layer ◽

Smooth Surface ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrate ◽

High Quality ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

We reported the successful growth of a crack-free high-quality 2 μm-thick Al0.5Ga0.5N film with a smooth surface grown on planar Si by metal–organic chemical vapor deposition.

Download Full-text