The effect of impurity-induced lattice strain and Fermi level position on low temperature oxygen diffusion in silicon
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1997 ◽
Vol 55
(12)
◽
pp. R7379-R7382
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1992 ◽
Vol 50
(1)
◽
pp. 88-89
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1983 ◽
Vol 1
(3)
◽
pp. 608
◽
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