Hydrogenated amorphous silicon films by 60 Hz glow‐discharge deposition

J. F. Fragalli; L. Misoguti; A. N. Nakagaito; V. Grivickas; V. S. Bagnato; H. M. Branz

doi:10.1063/1.355228

Hydrogenated amorphous silicon films by 60 Hz glow‐discharge deposition

Journal of Applied Physics ◽

10.1063/1.355228 ◽

1993 ◽

Vol 74 (1) ◽

pp. 668-671 ◽

Cited By ~ 4

Author(s):

J. F. Fragalli ◽

L. Misoguti ◽

A. N. Nakagaito ◽

V. Grivickas ◽

V. S. Bagnato ◽

...

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous ◽

Glow Discharge Deposition

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Glow discharge deposition of chlorinated and hydrogenated amorphous silicon films from SiCl4SiH4

Solar Energy Materials ◽

10.1016/0165-1633(84)90015-7 ◽

1984 ◽

Vol 9 (4) ◽

pp. 405-413 ◽

Cited By ~ 13

Author(s):

P. Danesh ◽

St. Georgiev ◽

U. Jahn

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous ◽

Glow Discharge Deposition

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Preparation and characterization of hydrogenated amorphous-silicon films produced by ion plating and hydrogenated amorphous-boron films produced by glow-discharge decomposition. Final report, April 1, 1980-May 31, 1981

10.2172/5962055 ◽

1981 ◽

Author(s):

F. Cocks ◽

P. Jones

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Final Report ◽

Amorphous Boron ◽

Ion Plating ◽

Hydrogenated Amorphous

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The influence of preparation parameters on the deposition rate, density and optical properties of thin hydrogenated amorphous silicon films prepared by r.f. glow discharge

Thin Solid Films ◽

10.1016/0040-6090(87)90396-8 ◽

1987 ◽

Vol 149 (3) ◽

pp. 331-340 ◽

Cited By ~ 3

Author(s):

G Myburg ◽

R Swanepoel

Keyword(s):

Optical Properties ◽

Glow Discharge ◽

Amorphous Silicon ◽

Deposition Rate ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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Theory of defect formation in the glow-discharge deposition of phosphorus-doped hydrogenated amorphous silicon

Physical Review B ◽

10.1103/physrevb.31.3654 ◽

1985 ◽

Vol 31 (6) ◽

pp. 3654-3658 ◽

Cited By ~ 9

Author(s):

F. J. Kampas ◽

P. E. Vanier

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Defect Formation ◽

Hydrogenated Amorphous Silicon ◽

Phosphorus Doped ◽

Hydrogenated Amorphous ◽

Glow Discharge Deposition

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Light-induced conductivity changes in hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

Thin Solid Films ◽

10.1016/0040-6090(86)90123-9 ◽

1986 ◽

Vol 135 (2) ◽

pp. 165-172 ◽

Cited By ~ 1

Author(s):

O.S. Panwar ◽

P.N. Dixit ◽

R. Bhattacharyya ◽

V.V. Shah

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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Heterogeneities and surface effects in glow discharge deposited hydrogenated amorphous silicon films

Thin Solid Films ◽

10.1016/0040-6090(82)90631-9 ◽

1982 ◽

Vol 90 (2) ◽

pp. 119-129 ◽

Cited By ~ 30

Author(s):

H. Fritzsche

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Surface Effects ◽

Silicon Films ◽

Hydrogenated Amorphous

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Optimisation of the RF power density to obtain good quality hydrogenated amorphous silicon films in a home-made glow discharge system

Optical Materials ◽

10.1016/j.optmat.2003.08.004 ◽

2004 ◽

Vol 25 (3) ◽

pp. 335-339 ◽

Cited By ~ 1

Author(s):

Akın Bacıoğlu ◽

Alp Osman Kodolbaş ◽

Özcan Öktü

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Power Density ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Rf Power ◽

Discharge System ◽

Hydrogenated Amorphous

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Diagnostics of a glow discharge used to produce hydrogenated amorphous-silicon films. Quarterly progress report, October 15, 1981-January 14, 1982

10.2172/5518202 ◽

1982 ◽

Author(s):

A. Gallagher ◽

J. Scott

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Progress Report ◽

Silicon Films ◽

Hydrogenated Amorphous

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Effect of silane dilution on intrinsic stress in glow discharge hydrogenated amorphous silicon films

Journal of Applied Physics ◽

10.1063/1.333148 ◽

1984 ◽

Vol 55 (4) ◽

pp. 946-951 ◽

Cited By ~ 75

Author(s):

J. P. Harbison ◽

A. J. Williams ◽

D. V. Lang

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Intrinsic Stress ◽

Hydrogenated Amorphous

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Hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

Journal of Applied Physics ◽

10.1063/1.336467 ◽

1986 ◽

Vol 59 (5) ◽

pp. 1578-1586 ◽

Cited By ~ 7

Author(s):

O. S. Panwar ◽

P. N. Dixit ◽

R. Bhattacharyya ◽

V. V. Shah

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous

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