Effect of silane dilution on intrinsic stress in glow discharge hydrogenated amorphous silicon films

1984 ◽  
Vol 55 (4) ◽  
pp. 946-951 ◽  
Author(s):  
J. P. Harbison ◽  
A. J. Williams ◽  
D. V. Lang
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Intrinsic Stress ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors

1986 ◽  
Vol 59 (5) ◽  
pp. 1578-1586 ◽  
Author(s):  
O. S. Panwar ◽  
P. N. Dixit ◽  
R. Bhattacharyya ◽  
V. V. Shah
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Efficient Boron Incorporation in Hydrogenated Amorphous Silicon Films by a Novel Combination of RF Glow Discharge Technique and Heated Filament

1995 ◽  
Vol 34 (Part 1, No. 10) ◽  
pp. 5743-5750 ◽  
Author(s):  
S. Chattopadhyay ◽  
Debabrata Das ◽  
S. N. Sharma ◽  
A K. Barua ◽  
Ratnabali Banerjee ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Rf Glow Discharge ◽  
Hydrogenated Amorphous ◽  
Heated Filament
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