Control of reactive plasmas in a multicusp plasma source equipped with a movable magnetic filter
2019 ◽
Vol 14
(0)
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pp. 1206088-1206088
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1991 ◽
Vol 111
(12)
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pp. 1057-1063
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2009 ◽
Vol 18
(2)
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pp. 025015
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1987 ◽
Vol 58
(8)
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pp. 1369-1381
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1991 ◽
Vol 49
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pp. 706-707
1998 ◽
Vol 08
(PR7)
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pp. Pr7-195-Pr7-203
1979 ◽
Vol 40
(C7)
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pp. C7-479-C7-480
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