Thin‐film growth and compositional effects in YBa2Cu3O7−xlayers prepared by metalorganic chemical vapor deposition

J. Hudner; O. Thomas; E. Mossang; P. Chaudouet; F. Weiss; D. Boursier; J. P. Senateur; M. Östling; A. Gaskov

doi:10.1063/1.354383

Thin‐film growth and compositional effects in YBa2Cu3O7−xlayers prepared by metalorganic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.354383 ◽

1993 ◽

Vol 74 (7) ◽

pp. 4631-4642 ◽

Cited By ~ 31

Author(s):

J. Hudner ◽

O. Thomas ◽

E. Mossang ◽

P. Chaudouet ◽

F. Weiss ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Thin Film Growth ◽

Compositional Effects ◽

Metalorganic Chemical

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Thin Film Growth of Pb(Zr, Ti)O3by Photoenhanced Metalorganic Chemical Vapor Deposition Using NO2

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.4074 ◽

1993 ◽

Vol 32 (Part 1, No. 9B) ◽

pp. 4074-4077 ◽

Cited By ~ 17

Author(s):

Masaru Shimizu ◽

Takuma Katayama ◽

Masataka Sugiyama ◽

Tadashi Shiosaki

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Thin Film Growth ◽

Metalorganic Chemical

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Reaction analysis for ZrO2 and Y2O3 thin film growth by low-pressure metalorganic chemical vapor deposition using β-diketonate complexes

Journal of Crystal Growth ◽

10.1016/0022-0248(94)00623-7 ◽

1995 ◽

Vol 147 (1-2) ◽

pp. 130-146 ◽

Cited By ~ 58

Author(s):

Yasunobu Akiyama ◽

Tsuneyuki Sato ◽

Nobuyuki Imaishi

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Low Pressure ◽

Thin Film Growth ◽

Metalorganic Chemical

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Barium Titanate Thin Film Growth by Low-pressure Metalorganic Chemical Vapor Deposition

ECS Transactions ◽

10.1149/1.3207608 ◽

2019 ◽

Vol 25 (8) ◽

pp. 327-332

Author(s):

Tetsuaki Sekine ◽

Yu Okumura ◽

Akira Satou ◽

Yasunobu Akiyama

Keyword(s):

Thin Film ◽

Barium Titanate ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Thin Film Growth ◽

Barium Titanate Thin Film ◽

Titanate Thin Film ◽

Metalorganic Chemical

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Effect of CO on Ru Nucleation and Ultra-Smooth Thin Film Growth by Chemical Vapor Deposition at Low Temperature

Chemistry of Materials ◽

10.1021/cm400321j ◽

2013 ◽

Vol 25 (9) ◽

pp. 1793-1799 ◽

Cited By ~ 10

Author(s):

Wen Liao ◽

John G. Ekerdt

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Thin Film Growth

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Ferroelectric SrBi2Ta2O9 thin film deposition at 550 °C by plasma-enhanced metalorganic chemical vapor deposition onto a metalorganic chemical vapor deposition platinum bottom electrode

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581554 ◽

1999 ◽

Vol 17 (1) ◽

pp. 83-87 ◽

Cited By ~ 5

Author(s):

Nak-Jin Seong ◽

Eun-Suck Choi ◽

Soon-Gil Yoon

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Bottom Electrode ◽

Chemical Vapor ◽

Thin Film Deposition ◽

Film Deposition ◽

Metalorganic Chemical

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Compositional effects in YxBayCuzO7−δthin films prepared by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.108878 ◽

1993 ◽

Vol 62 (6) ◽

pp. 633-635 ◽

Cited By ~ 18

Author(s):

B. Schulte ◽

M. Maul ◽

P. Häussler ◽

H. Adrian

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Compositional Effects ◽

Metalorganic Chemical

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Plasma-Enhanced Metalorganic Chemical Vapor Deposition for High Temperature Superconducting Thin Film

Materials Science Forum ◽

10.4028/www.scientific.net/msf.140-142.457 ◽

1993 ◽

Vol 140-142 ◽

pp. 457-464

Author(s):

Kenji Ebihara ◽

Tomoaki Ikegami

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Film ◽

High Temperature Superconducting ◽

Metalorganic Chemical

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Barium Titanate Thin Film Growth by Low-Pressure Metallorganic Chemical Vapor Deposition

ECS Meeting Abstracts ◽

10.1149/ma2009-02/34/2501 ◽

2009 ◽

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Barium Titanate ◽

Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Low Pressure ◽

Thin Film Growth ◽

Barium Titanate Thin Film ◽

Titanate Thin Film

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Effect of hydrogen atmosphere in Cu thin film growth by chemical vapor deposition using Cu(dmamb)2

Microelectronic Engineering ◽

10.1016/j.mee.2011.08.009 ◽

2012 ◽

Vol 89 ◽

pp. 109-115 ◽

Cited By ~ 1

Author(s):

Jong Mun Choi ◽

Dohan Lee ◽

Ji Hun Park ◽

Chang Gyoun Kim ◽

Taek-Mo Chung ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Film Growth ◽

Chemical Vapor ◽

Hydrogen Atmosphere ◽

Thin Film Growth ◽

Cu Thin Film

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Compositional effects on plasma‐enhanced metalorganic chemical vapor deposition of YBa2Cu3O7−xthin films

Applied Physics Letters ◽

10.1063/1.104752 ◽

1991 ◽

Vol 58 (24) ◽

pp. 2839-2841 ◽

Cited By ~ 40

Author(s):

J. Zhao ◽

C. S. Chern ◽

Y. Q. Li ◽

P. Norris ◽

B. Gallois ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Compositional Effects ◽

Metalorganic Chemical

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