Evolution of microstructures in hydrogenated silicon films prepared by diluted‐hydrogen and hydrogen‐atom‐treatment methods

1993 ◽  
Vol 73 (10) ◽  
pp. 4841-4847 ◽  
Author(s):  
Kuo‐Chiang Hsu ◽  
Hua Chang ◽  
Huey‐Liang Hwang
Keyword(s):  
Hydrogen Atom ◽  
Silicon Films ◽  
Treatment Methods ◽  
Hydrogenated Silicon

Effects of Diluted-Hydrogen and Hydrogen-Atom-Treatment on the Silicon-Hydrogen Bonding Configurations of Hydrogenated Silicon Films

1992 ◽  
Vol 283 ◽  
Author(s):  
K. C. Hsu ◽  
H. Chang ◽  
H. L. Hwang
Keyword(s):  
Hydrogen Bonding ◽  
Hydrogen Atom ◽  
Atomic Hydrogen ◽  
Nmr Spectra ◽  
Silicon Films ◽  
Degree Of Crystallinity ◽  
Hydrogen Treatment ◽  
Hydrogenated Silicon ◽  
Bonding Configuration ◽  
Raman Scattering Spectra

ABSTRACTThe silicon—hydrogen bonding configuration studies of hydrogenated silicon films that were fabricated by diluted—hydrogen and hydrogen—atom—treatment methods are presented. The diluted—hydrogen samples tend to show a very sharp line—shape in the NMR spectra as the H2/SiH4 dilution ratio is increased and/or temperature is elevated. The addition of atomic hydrogen treatment can produce the same NMR spectra at a temperature lower than 200°C. The Raman scattering spectra show that the μc—Si phase can be formed by the atomic hydrogen treatment. The infrared absorption spectra also indicate an increase of SiH2 bonding configuration and a hydrogen content reduction when atomic hydrogen treatment is employed. These results suggest that the degree of crystallinity of hydrogenated silicon films can be systematically adjusted.

Advanced modeling for optical characterization of amorphous hydrogenated silicon films

2013 ◽  
Vol 541 ◽  
pp. 12-16 ◽  
Author(s):  
Daniel Franta ◽  
David Nečas ◽  
Lenka Zajíčková ◽  
Ivan Ohlídal ◽  
Jiří Stuchlík
Keyword(s):  
Optical Characterization ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon

Microstructures of Hydrogenated Silicon Films Prepared by Ion Plating

1986 ◽  
Vol 25 (Part 1, No. 6) ◽  
pp. 775-778 ◽  
Author(s):  
Hideki Shimizu ◽  
Satoshi Mizuno ◽  
Mikio Noda
Keyword(s):  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Ion Plating

Fluorinated hydrogenated silicon films

1990 ◽  
Vol 186 (2) ◽  
pp. L47-L50
Author(s):  
D.H. Zhang ◽  
D. Haneman
Keyword(s):  
Silicon Films ◽  
Hydrogenated Silicon
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