Characterization of He/CH4dc glow discharge plasmas by optical emission spectroscopy, mass spectrometry, and actinometry
2018 ◽
Vol 442
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pp. 412-416
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2015 ◽
Vol 30
(12)
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pp. 2496-2506
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2017 ◽
Vol 53
(3)
◽
pp. 319-326
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Keyword(s):
2011 ◽
Vol 26
(4)
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pp. 758-765
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Keyword(s):
Keyword(s):