Spatial characterization of pressure-based plasma regimes in a radiofrequency glow discharge by using optical emission spectroscopy
2011 ◽
Vol 26
(4)
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pp. 758-765
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2010 ◽
Vol 65
(7)
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pp. 533-541
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2018 ◽
Vol 442
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pp. 412-416
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Keyword(s):
2004 ◽
Vol 19
(3)
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pp. 333
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Keyword(s):
2004 ◽
Vol 19
(3)
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pp. 345-353
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2014 ◽
Vol 313
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pp. 742-749
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