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Nadine Collaert ◽  
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Epitaxial Growth ◽  
High Performance ◽  
Selective Epitaxial Growth ◽  
Strained Sige

Thick selective epitaxial growth of silicon at 960°C using silane only

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Epitaxial Growth ◽  
Selective Epitaxial Growth

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Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth
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