A surface kinetics model for the growth of Si1−xGexfilms from SiH4/GeH4mixtures
Keyword(s):
2000 ◽
Vol 218
(2-4)
◽
pp. 245-249
◽
1980 ◽
2002 ◽
Vol 149
(2)
◽
pp. G118
◽
Keyword(s):
A Gas‐Phase and Surface Kinetics Model for Silicon Epitaxial Growth with SiH2Cl2 in an RTCVD Reactor
1995 ◽
Vol 142
(1)
◽
pp. 259-266
◽
2013 ◽
Vol 117
(47)
◽
pp. 12184-12195
◽
Keyword(s):
1987 ◽
Vol 28
(1)
◽
pp. 1-8
◽
Keyword(s):