Inelastic electron tunneling study of crystallization effects and defect energies in hafnium oxide gate dielectrics

2011 ◽  
Vol 98 (3) ◽  
pp. 032108 ◽  
Author(s):  
Eun Ji Kim ◽  
Michael Shandalov ◽  
Krishna C. Saraswat ◽  
Paul C. McIntyre
Keyword(s):  
Hafnium Oxide ◽  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Inelastic Electron ◽  
Defect Energies ◽  
Inelastic Electron Tunneling

Inelastic Electron Tunneling Spectroscopy Study of Thin Gate Dielectrics

2010 ◽  
Vol 22 (26-27) ◽  
pp. 2962-2968 ◽  
Author(s):  
James W. Reiner ◽  
Sharon Cui ◽  
Zuoguang Liu ◽  
Miaomiao Wang ◽  
Charles H. Ahn ◽  
...  
Keyword(s):  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Tunneling Spectroscopy ◽  
Inelastic Electron ◽  
Spectroscopy Study ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy
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