Low loss superconducting titanium nitride coplanar waveguide resonators
2018 ◽
Vol 15
(3)
◽
pp. 101-106
Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators
2013 ◽
Vol 27
(1)
◽
pp. 015009
◽
Keyword(s):
2009 ◽
Vol 27
(5)
◽
pp. 2286
◽