The effect of molecular ions on the plasma parameters in a medium pressure rare gas radio frequency discharge positive column

1992 ◽  
Vol 72 (7) ◽  
pp. 2632-2637 ◽  
Author(s):  
Jen‐Shih Chang ◽  
Y. Ichikawa ◽  
R. M. Hobson ◽  
S. Matsumura ◽  
S. Teii
Keyword(s):  
Radio Frequency ◽  
Positive Column ◽  
Molecular Ions ◽  
Rare Gas ◽  
Plasma Parameters ◽  
Medium Pressure ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

THE COMPOSITION OF THE POSITIVE COLUMN OF A HELIUM GLOW DISCHARGE AT INTERMEDIATE PRESSURES

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-127-C7-128
Author(s):  
F. Dothan ◽  
Yu. M. Kagan
Keyword(s):  
Glow Discharge ◽  
Differential Equations ◽  
Positive Column ◽  
Molecular Ions ◽  
Time Change ◽  
The Other ◽  
System Of Differential Equations ◽  
Plasma Parameters ◽  
Electron Collisions

The concentration of atomic and molecular ions and metastables is investigated for the positive column of a helium glow discharge. Recently (1,2) the system of differential equations for the helium afterglow describing the time change of these plasma parameters was written and solved. In the stationary positive column we can neglect some processes which are importent in the afterglow. On the other side we must take into account processes of excitation and ionization by electron collisions which can be neglected in the afterglow.

Plasma parameters of a radio frequency discharge

1990 ◽  
Vol 61 (1) ◽  
pp. 448-450 ◽  
Author(s):  
C. A. Anderson ◽  
M. B. Hopkins ◽  
W. G. Graham
Keyword(s):  
Radio Frequency ◽  
Plasma Parameters ◽  
Radio Frequency Discharge
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