Plasma parameters of a radio frequency discharge

1990 ◽  
Vol 61 (1) ◽  
pp. 448-450 ◽  
Author(s):  
C. A. Anderson ◽  
M. B. Hopkins ◽  
W. G. Graham
Keyword(s):  
Radio Frequency ◽  
Plasma Parameters ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

The effect of molecular ions on the plasma parameters in a medium pressure rare gas radio frequency discharge positive column

1992 ◽  
Vol 72 (7) ◽  
pp. 2632-2637 ◽  
Author(s):  
Jen‐Shih Chang ◽  
Y. Ichikawa ◽  
R. M. Hobson ◽  
S. Matsumura ◽  
S. Teii
Keyword(s):  
Radio Frequency ◽  
Positive Column ◽  
Molecular Ions ◽  
Rare Gas ◽  
Plasma Parameters ◽  
Medium Pressure ◽  
Radio Frequency Discharge
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