Study of the structure of radio frequency glow discharges in CH4and H2by spatiotemporal optical emission spectroscopy

1992 ◽  
Vol 71 (5) ◽  
pp. 2143-2150 ◽  
Author(s):  
Fumiyoshi Tochikubo ◽  
Toshiaki Makabe ◽  
Shigeru Kakuta ◽  
Akira Suzuki
Keyword(s):  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Glow Discharges

Optical emission spectroscopy of rf glow discharges of methane–silane mixtures

1998 ◽  
Vol 317 (1-2) ◽  
pp. 120-123 ◽  
Author(s):  
J.L Andújar ◽  
E Pascual ◽  
G Viera ◽  
E Bertran
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Glow Discharges

Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

2002 ◽  
Vol 373 (7) ◽  
pp. 656-663 ◽  
Author(s):  
Kenneth R. Marcus ◽  
Alwyn B. Anfone ◽  
Wandee Luesaiwong ◽  
Teresa A. Hill ◽  
Dvora Perahia ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge

Study of the structure in rf glow discharges in SiH4/H2by spatiotemporal optical emission spectroscopy: Influence of negative ions

1990 ◽  
Vol 68 (11) ◽  
pp. 5532-5539 ◽  
Author(s):  
Fumiyoshi Tochikubo ◽  
Akira Suzuki ◽  
Shigeru Kakuta ◽  
Yuko Terazono ◽  
Toshiaki Makabe
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Negative Ions ◽  
Optical Emission ◽  
Glow Discharges

Selective Grafting of Amine Groups on Polyethylene by Means of Modulated RF NH3 Plasmas

1998 ◽  
Vol 544 ◽  
Author(s):  
M. Creatore ◽  
G. Cicala ◽  
P. Favia ◽  
R. Lamendola ◽  
R. d'Agostno
Keyword(s):  
Electron Spectroscopy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Surface Composition ◽  
Optical Emission ◽  
Active Species ◽  
Time Resolved ◽  
Glow Discharges ◽  
Before And After ◽  
Amine Groups

AbstractPlasma treatments in power modulated NH3 RF glow discharges have been performed for modifying the surface of polyethylene (PE). Time Resolved Optical Emission Spectroscopy (TR-OES) has been utilized for monitoring the emission of active species during the modulation period of the discharge, Electron Spectroscopy for Chemical Analysis (ESCA) has been used for studying the surface composition of PE before and after the derivatization of plasmagrafted -NH2 groups. We present our preliminary results here, which show how modulated NH3 plasmas can effectively improve the grafting selectivity of -NH2 respect to all other N-containing groups.

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