Modeling reactive sputtering process in symmetrical planar direct current magnetron systems

1992 ◽  
Vol 71 (10) ◽  
pp. 5173-5182 ◽  
Author(s):  
C. D. Tsiogas ◽  
J. N. Avaritsiotis
Keyword(s):  
Direct Current ◽  
Reactive Sputtering

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Lina Tengdelius ◽  
Mattias Samuelsson ◽  
Fredrik Eriksson ◽  
Esteban Broitman ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Reactive Sputtering ◽  
Direct Current Magnetron Sputtering

scholarly journals Substoichiometric zirconia thin films prepared by reactive sputtering of metallic zirconium using a direct current ion beam source

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Vol 680 ◽  
pp. 52-60 ◽  
Author(s):  
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Benedict Neumann ◽  
Bernhard Klötzer ◽  
Simon Penner
Keyword(s):  
Thin Films ◽  
Direct Current ◽  
Ion Beam ◽  
Reactive Sputtering ◽  
Beam Source
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