Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3

2010 ◽  
Vol 97 (3) ◽  
pp. 034104 ◽  
Author(s):  
Swayambhu Behera ◽  
Joe Lee ◽  
Sneha Gaddam ◽  
Sundari Pokharel ◽  
Justin Wilks ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Glass Film ◽  
Organosilicate Glass ◽  
Low K

Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass

2014 ◽  
Vol 116 (4) ◽  
pp. 044103 ◽  
Author(s):  
X. Guo ◽  
J. E. Jakes ◽  
S. Banna ◽  
Y. Nishi ◽  
J. L. Shohet
Keyword(s):  
Mechanical Properties ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Exposure ◽  
Organosilicate Glass ◽  
Low K

Trench Filling Properties of Low k Insulated Layer Using Vacuum Ultraviolet Light-CVD

2016 ◽  
Vol 5 (6) ◽  
pp. N32-N34 ◽  
Author(s):  
Woo-Jin Lee ◽  
Hideaki Fukuda ◽  
Tae Hyung Kim ◽  
Yong-Ho Choa
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Low K

Damage to low-k porous organosilicate glass from vacuum-ultraviolet irradiation

2011 ◽  
Author(s):  
J. L. Shohet ◽  
H. Sinha ◽  
H. Ren ◽  
M. T. Nichols ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Organosilicate Glass ◽  
Low K

Simultaneous removal of NO and SO2 using vacuum ultraviolet light (VUV)/heat/peroxymonosulfate (PMS)

Chemosphere ◽  
2018 ◽  
Vol 190 ◽  
pp. 431-441 ◽  
Author(s):  
Yangxian Liu ◽  
Yan Wang ◽  
Qian Wang ◽  
Jianfeng Pan ◽  
Jun Zhang
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Simultaneous Removal

Surface modification of polymeric thin films with vacuum ultraviolet light

2008 ◽  
Vol 40 (3-4) ◽  
pp. 400-403 ◽  
Author(s):  
E. Sarantopoulou ◽  
J. Kovač ◽  
Z. Kollia ◽  
I. Raptis ◽  
S. Kobe ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Polymeric Thin Films
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