Effects of vacuum ultraviolet radiation on deposited and ultraviolet-cured low-k porous organosilicate glass

2011 ◽  
Vol 29 (3) ◽  
pp. 030602 ◽  
Author(s):  
H. Sinha ◽  
G. A. Antonelli ◽  
G. Jiang ◽  
Y. Nishi ◽  
J. L. Shohet
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Organosilicate Glass ◽  
Low K

Surface photoconductivity of organosilicate glass dielectrics induced by vacuum-ultraviolet radiation

2013 ◽  
Vol 114 (6) ◽  
pp. 064104 ◽  
Author(s):  
H. Zheng ◽  
M. T. Nichols ◽  
D. Pei ◽  
Y. Nishi ◽  
J. L. Shohet
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Organosilicate Glass

Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

2016 ◽  
Vol 109 (12) ◽  
pp. 122902 ◽  
Author(s):  
F. A. Choudhury ◽  
H. M. Nguyen ◽  
M. R. Baklanov ◽  
J. F. de Marneffe ◽  
W. Li ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Low K

Modification of organosilicate glasses low-k films under extreme and vacuum ultraviolet radiation

2013 ◽  
Vol 102 (11) ◽  
pp. 111902 ◽  
Author(s):  
T. V. Rakhimova ◽  
A. T. Rakhimov ◽  
Yu. A. Mankelevich ◽  
D. V. Lopaev ◽  
A. S. Kovalev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Organosilicate Glasses ◽  
Low K

Effects of aging on poly(1-trimethylsilyl-1-propyne) membranes irradiated with vacuum ultraviolet radiation for gas separation

2017 ◽  
Vol 135 (11) ◽  
pp. 45973 ◽  
Author(s):  
Tetsuro Yoshioka ◽  
Yoshiki Miyashita ◽  
Taichi Motoo ◽  
Kentaro Saito ◽  
Kazukiyo Nagai
Keyword(s):  
Ultraviolet Radiation ◽  
Gas Separation ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Effects Of Aging
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