Low-temperature buffer layer effects on the quality of ZnTe epilayers grown on sapphire substrates

2010 ◽  
Vol 107 (12) ◽  
pp. 123525 ◽  
Author(s):  
Qixin Guo ◽  
Masaki Nada ◽  
Yaliu Ding ◽  
Tooru Tanaka ◽  
Mitsuhiro Nishio
Keyword(s):  
Low Temperature ◽  
Buffer Layer ◽  
Sapphire Substrates

Effects of the Nitridation Process of (0001) Sapphire on Crystalline Quality of InN Grown by RF-MBE

2004 ◽  
Vol 831 ◽  
Author(s):  
Daisuke Muto ◽  
Ryotaro Yoneda ◽  
Hiroyuki Naoi ◽  
Masahito Kurouchi ◽  
Tsutomu Araki ◽  
...  
Keyword(s):  
Low Temperature ◽  
Buffer Layer ◽  
Buffer Layers ◽  
Crystalline Quality ◽  
Constant Independent ◽  
Nitrogen Flux ◽  
Sapphire Substrates ◽  
Nitridation Process ◽  
Flux Modulation

ABSTRACTThe effects of the nitridation process of (0001) sapphire on crystalline quality of InN were clearly demonstrated. The InN films were grown on NFM (nitrogen flux modulation) HT-InN or LT-InN buffer layers, which had been deposited on nitridated sapphire substrates. We found that low-temperature nitridation of sapphire is effective in improving the tilt distribution of InN films. Whereas the twist distribution remained narrow and almost constant, independent of nitridation conditions, when LT-InN buffer layers were used. The XRC-FWHM value of 54 arcsec for (0002) InN, the lowest reported to date, was achieved by using the LT-InN buffer layer and sapphire nitridation at 300°C for 3 hours.

scholarly journals Morphology and surface reconstructions of m-plane GaN

2002 ◽  
Vol 743 ◽  
Author(s):  
C. D. Lee ◽  
R. M. Feenstra ◽  
J. E. Northrup ◽  
L. Lymperakis ◽  
J. Neugebauer
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Surface Morphology ◽  
Buffer Layer ◽  
Molecular Beam ◽  
Structural Quality ◽  
Surface Reconstructions ◽  
Gan Buffer Layer

ABSTRACTM-plane GaN(1100) is grown by plasma assisted molecular beam epitaxy on ZnO(1100) substrates. A low-temperature GaN buffer layer is found to be necessary to obtain good structural quality of the films. Well oriented (1100) GaN films are obtained, with a slate like surface morphology. On the GaN(1100) surfaces, reconstructions with symmetry of c(2×2) and approximate “4×5” are found under N- and Ga-rich conditions, respectively. We propose a model for Ga-rich conditions with the “4×5” structure consisting of ≥ 2 monolayers of Ga terminating the GaN surface.

Improvement of the crystalline quality of the ZnO epitaxial layer on a low-temperature grown ZnO buffer layer

2004 ◽  
Vol 266 (4) ◽  
pp. 505-510 ◽  
Author(s):  
J.F. Yan ◽  
Y.M. Lu ◽  
Y.C. Liu ◽  
H.W. Liang ◽  
B.H. Li ◽  
...  
Keyword(s):  
Low Temperature ◽  
Buffer Layer ◽  
Epitaxial Layer ◽  
Crystalline Quality ◽  
Zno Buffer Layer

Improvement in the Quality of ZnTe Epilayers Grown on GaAs Substrates by Introducing a Low-Temperature Buffer Layer

2009 ◽  
Vol 48 (8) ◽  
pp. 080208 ◽  
Author(s):  
Qixin Guo ◽  
Yusuke Sueyasu ◽  
Tooru Tanaka ◽  
Mitsuhiro Nishio ◽  
Juncheng Cao
Keyword(s):  
Low Temperature ◽  
Buffer Layer ◽  
Gaas Substrates

Study of the structural quality of GaN epitaxial layers obtained by hydride vapor phase epitaxy using a low-temperature buffer layer

2015 ◽  
Vol 60 (6) ◽  
pp. 889-894
Author(s):  
I. A. Belogorohov ◽  
A. A. Donskov ◽  
S. N. Knyazev ◽  
Yu. P. Kozlova ◽  
V. F. Pavlov ◽  
...  
Keyword(s):  
Low Temperature ◽  
Buffer Layer ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Structural Quality ◽  
Epitaxial Layers
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