Three‐dimensional solid‐phase‐epitaxial regrowth from As+‐implanted Si
1998 ◽
Vol 79
(01)
◽
pp. 104-109
◽
Keyword(s):
Keyword(s):
Keyword(s):
1986 ◽
Vol 41
(10)
◽
pp. 1315-1322
◽