Catalytic chemical vapor deposition method to prepare high quality hydro‐fluorinated amorphous silicon

Hideki Matsumura; Hisanori Ihara

doi:10.1063/1.342069

Catalytic chemical vapor deposition method to prepare high quality hydro‐fluorinated amorphous silicon

Journal of Applied Physics ◽

10.1063/1.342069 ◽

1988 ◽

Vol 64 (11) ◽

pp. 6505-6509 ◽

Cited By ~ 19

Author(s):

Hideki Matsumura ◽

Hisanori Ihara

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

High Quality ◽

Catalytic Chemical Vapor Deposition

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Catalytic chemical vapor deposition method to obtain high quality amorphous silicon and silicon-germanium

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(87)90330-9 ◽

1987 ◽

Vol 97-98 ◽

pp. 1379-1382 ◽

Cited By ~ 3

Author(s):

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Silicon Germanium ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

High Quality ◽

Catalytic Chemical Vapor Deposition

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Study on catalytic chemical vapor deposition method to prepare hydrogenated amorphous silicon

Journal of Applied Physics ◽

10.1063/1.343278 ◽

1989 ◽

Vol 65 (11) ◽

pp. 4396-4402 ◽

Cited By ~ 109

Author(s):

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Hydrogenated Amorphous

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High-quality diamond film deposition on a titanium substrate using the hot-filament chemical vapor deposition method

Diamond and Related Materials ◽

10.1016/j.diamond.2006.12.016 ◽

2007 ◽

Vol 16 (8) ◽

pp. 1530-1540 ◽

Cited By ~ 34

Author(s):

Liang Guo ◽

Guohua Chen

Keyword(s):

Chemical Vapor Deposition ◽

Diamond Film ◽

Vapor Deposition ◽

Titanium Substrate ◽

Chemical Vapor ◽

Film Deposition ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

High Quality ◽

Hot Filament

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Effect of Template on the Structure of Carbon Nanotubes Grown by Catalytic Chemical Vapor Deposition Method

Modern Chemistry & Applications ◽

10.4172/2329-6798.1000207 ◽

2017 ◽

Vol 05 (02) ◽

Author(s):

Hekmat F ◽

Sohrabi B ◽

Rahmanifar MS

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Structure Of Carbon Nanotubes

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Intrinsic Amorphous Silicon (a-Si:H) Thin Film Prepared by Using Remote Plasma Chemical Vapor Deposition Method and Used as a Passivation Layer for a Heterojunction Solar Cell

Journal of the Korean Physical Society ◽

10.3938/jkps.54.194 ◽

2009 ◽

Vol 54 (1) ◽

pp. 194-199 ◽

Cited By ~ 12

Author(s):

Minsung Jeon ◽

Shuhei Yoshiba ◽

Koichi Kamisako

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Solar Cell ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Catalytic Chemical Vapor Deposition (CTL-CVD) Method to Obtain High Quality Amorphous Silicon Alloys

MRS Proceedings ◽

10.1557/proc-118-43 ◽

1988 ◽

Vol 118 ◽

Cited By ~ 9

Author(s):

Hideki Matsujmura

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

High Quality ◽

Silicon Alloys ◽

Catalytic Chemical Vapor Deposition ◽

Cvd Method

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Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

Thin Solid Films ◽

10.1016/j.tsf.2007.06.185 ◽

2008 ◽

Vol 516 (5) ◽

pp. 687-690 ◽

Cited By ~ 26

Author(s):

Hiroaki Yasuoka ◽

Masahiro Yoshida ◽

Ken Sugita ◽

Keisuke Ohdaira ◽

Hideyuki Murata ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition

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Microstructure of Polysilicon Films Grown by Catalytic Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.92 ◽

1998 ◽

Vol 37 (Part 1, No. 1) ◽

pp. 92-93 ◽

Cited By ~ 8

Author(s):

An-Qiang He ◽

Akira Heya ◽

Nobuo Otsuka ◽

Hideki Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Polysilicon Films

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The Catalyst for Growing Single-Walled Carbon Nanotubes by Catalytic Chemical Vapor Deposition Method

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.1297 ◽

2009 ◽

Vol 9 (4) ◽

pp. 2480-2495 ◽

Cited By ~ 24

Author(s):

Avetik R. Harutyunyan

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Single Walled Carbon Nanotubes ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Catalytic Chemical Vapor Deposition ◽

Single Walled Carbon ◽

Walled Carbon Nanotubes

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Phase separations of single-crystal nanowires grown by self-catalytic chemical vapor deposition method

The Journal of Chemical Physics ◽

10.1063/1.2432111 ◽

2007 ◽

Vol 126 (6) ◽

pp. 064704 ◽

Cited By ~ 14

Author(s):

Maoqi He ◽

Abhishek Motayed ◽

S. Noor Mohammad

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Phase Separations ◽

Catalytic Chemical Vapor Deposition

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