An electron‐spin resonance study of the structure of plasma‐deposited silicon‐oxynitride films

1987 ◽  
Vol 62 (3) ◽  
pp. 832-836 ◽  
Author(s):  
C. M. M. Denisse ◽  
J. F. M. Janssen ◽  
F. H. P. M. Habraken ◽  
W. F. Van der Weg ◽  
E. G. P. Schuivens
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