A two‐temperature model of the inductively coupled rf plasma
2004 ◽
Vol 2004
(IAUS226)
◽
pp. 506-510
2018 ◽
Vol 40
(1)
◽
Keyword(s):
2019 ◽
Vol 57
(3)
◽
pp. 631-639
◽
2012 ◽
Vol 55
(5-6)
◽
pp. 1620-1627
◽
Keyword(s):
1981 ◽
Vol 19
(9)
◽
pp. 2129-2149
◽
2018 ◽
Vol 5
(1)
◽
pp. 016518
◽