Monte‐Carlo simulation of electron properties in rf parallel plate capacitively coupled discharges

1983 ◽  
Vol 54 (9) ◽  
pp. 4958-4965 ◽  
Author(s):  
M. J. Kushner
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Parallel Plate ◽  
Capacitively Coupled

scholarly journals Monte Carlo Simulation of an Ar RF Parallel Plate Discharge Plasma Employing LPWS

2003 ◽  
Vol 123 (9) ◽  
pp. 869-877 ◽  
Author(s):  
Ikuya Horie ◽  
Takuma Suzuki ◽  
Yoshiyuki Ohmori ◽  
Kazutaka Kitamori ◽  
Koichi Maruyama
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Parallel Plate ◽  
Discharge Plasma

scholarly journals Statistical Modeling of 3-D Parallel-Plate Embedded Capacitors Using Monte Carlo Simulation

ETRI Journal ◽  
2001 ◽  
Vol 23 (1) ◽  
pp. 23-32 ◽  
Author(s):  
Ilgu Yun Yun ◽  
Ravi Poddar Poddar ◽  
Lawrence Carastro Carastro ◽  
Martin Brooke Brooke ◽  
Gary S. May May
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Statistical Modeling ◽  
Parallel Plate ◽  
Embedded Capacitors
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