Preparation of doped amorphous silicon films by ionized‐cluster beam deposition

1983 ◽  
Vol 54 (3) ◽  
pp. 1583-1587 ◽  
Author(s):  
I. Yamada ◽  
I. Nagai ◽  
M. Horie ◽  
T. Takagi
Keyword(s):  
Amorphous Silicon ◽  
Silicon Films ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition

Photoluminescence and resonant Raman spectra of silicon films produced by size-selected cluster beam deposition

1997 ◽  
Vol 56 (11) ◽  
pp. 6958-6964 ◽  
Author(s):  
M. Ehbrecht ◽  
B. Kohn ◽  
F. Huisken ◽  
M. A. Laguna ◽  
V. Paillard
Keyword(s):  
Raman Spectra ◽  
Silicon Films ◽  
Cluster Beam ◽  
Resonant Raman ◽  
Cluster Beam Deposition ◽  
Beam Deposition

New phases of amorphous carbon and silicon films obtained by low energy cluster beam deposition

1996 ◽  
Vol 217-218 ◽  
pp. 69-73 ◽  
Author(s):  
P. Melinon ◽  
B. Prevel ◽  
V. Dupuis ◽  
A. Perez ◽  
B. Champagnon ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Low Energy ◽  
Silicon Films ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Energy Cluster ◽  
Beam Deposition

Mass selection of neutral clusters in Low‐Energy Cluster Beam Deposition experiments: Is it realistic?

1994 ◽  
Vol 64 (10) ◽  
pp. 1212-1214 ◽  
Author(s):  
J. F. Roux ◽  
B. Cabaud ◽  
G. Fuchs ◽  
D. Guillot ◽  
A. Hoareau ◽  
...  
Keyword(s):  
Low Energy ◽  
Mass Selection ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Energy Cluster ◽  
Selection Of ◽  
Beam Deposition

scholarly journals Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

2011 ◽  
Vol 21 (4) ◽  
pp. 045013 ◽  
Author(s):  
Mattia Marelli ◽  
Giorgio Divitini ◽  
Cristian Collini ◽  
Luca Ravagnan ◽  
Gabriele Corbelli ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition

Ionized-Cluster Beam Deposition

1975 ◽  
pp. 341-346 ◽  
Author(s):  
T. Takagi ◽  
I. Yamada ◽  
K. Yanagawa
Keyword(s):  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition

Gas Sensor Arrays by Supersonic Cluster Beam Deposition

2019 ◽  
pp. 282-284
Author(s):  
E. Barborini ◽  
M. Leccardi ◽  
G. Bertolini ◽  
O. Rorato ◽  
M. Franchi ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Sensor Arrays ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition ◽  
Gas Sensor Arrays
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