Quantitative electron microprobe analysis of thin films on substrates with a new Monte Carlo simulation

1983 ◽  
Vol 54 (2) ◽  
pp. 1110-1114 ◽  
Author(s):  
Kenji Murata ◽  
Masatoshi Kotera ◽  
Koichi Nagami
Keyword(s):  
Thin Films ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Microprobe ◽  
Microprobe Analysis ◽  
Electron Microprobe Analysis

Quantitative electron microprobe analysis of aluminum, copper, and gold thin films on silicon substrates

2002 ◽  
Vol 92 (6) ◽  
pp. 3404-3409 ◽  
Author(s):  
Masaaki Yasuda ◽  
Shunji Yamauchi ◽  
Hiroaki Kawata ◽  
Kenji Murata
Keyword(s):  
Thin Films ◽  
Electron Microprobe ◽  
Microprobe Analysis ◽  
Electron Microprobe Analysis ◽  
Silicon Substrates ◽  
Gold Thin Films
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