Quantitative electron microprobe analysis of aluminum, copper, and gold thin films on silicon substrates

Masaaki Yasuda; Shunji Yamauchi; Hiroaki Kawata; Kenji Murata

doi:10.1063/1.1502923

Quantitative electron microprobe analysis of aluminum, copper, and gold thin films on silicon substrates

Journal of Applied Physics ◽

10.1063/1.1502923 ◽

2002 ◽

Vol 92 (6) ◽

pp. 3404-3409 ◽

Cited By ~ 8

Author(s):

Masaaki Yasuda ◽

Shunji Yamauchi ◽

Hiroaki Kawata ◽

Kenji Murata

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis ◽

Silicon Substrates ◽

Gold Thin Films

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Electron Microprobe Analysis of Tantalum-Nitride Thin Films

10.2172/12042150 ◽

1979 ◽

Author(s):

D. L. Stoltz ◽

Starkey J. P.

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis ◽

Tantalum Nitride

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An Electron Microprobe Analysis of Cu2−x Layers Chemiplated on Single Crystals and Thin Films of CdS

Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse ◽

10.1007/978-3-662-12108-5_75 ◽

1969 ◽

pp. 447-457 ◽

Cited By ~ 1

Author(s):

M. Fabbricotti ◽

A. v. Aerschodt ◽

J. J. Loferski ◽

K. K. Reinhartz ◽

A. P. v. Rosenstiel ◽

...

Keyword(s):

Thin Films ◽

Single Crystals ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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Quantitative Electron Microprobe Analysis of Thin Films on Substrates

IBM Journal of Research and Development ◽

10.1147/rd.184.0352 ◽

1974 ◽

Vol 18 (4) ◽

pp. 352-363 ◽

Cited By ~ 118

Author(s):

D. F. Kyser ◽

K. Murata

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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A Simple Quantitative Electron Microprobe Analysis of Multielement Thin Films on Substrate

Japanese Journal of Applied Physics ◽

10.1143/jjap.15.2253 ◽

1976 ◽

Vol 15 (11) ◽

pp. 2253-2254 ◽

Cited By ~ 4

Author(s):

Kenji Murata ◽

Tetsuji Sato ◽

Koichi Nagami

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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Automatic Stepping Shutter System for Preparing Standard Thin Films for Electron Microprobe Analysis

Review of Scientific Instruments ◽

10.1063/1.1720576 ◽

1967 ◽

Vol 38 (10) ◽

pp. 1523-1523 ◽

Cited By ~ 1

Author(s):

James P. Smith ◽

Ralph F. Tenny

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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On the electron microprobe analysis of structured magnetic thin films

Thin Solid Films ◽

10.1016/0040-6090(72)90388-4 ◽

1972 ◽

Vol 12 (1) ◽

pp. 29-34 ◽

Cited By ~ 1

Author(s):

H. Hieber

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis ◽

Magnetic Thin Films

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Investigation of d.c.-reactive magnetron-sputtered AlN thin films by electron microprobe analysis, X-ray photoelectron spectroscopy and polarised infra-red reflection

Surface and Coatings Technology ◽

10.1016/s0257-8972(98)00527-1 ◽

1998 ◽

Vol 106 (2-3) ◽

pp. 205-208 ◽

Cited By ~ 62

Author(s):

D. Manova ◽

V. Dimitrova ◽

W. Fukarek ◽

D. Karpuzov

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Photoelectron Spectroscopy ◽

Microprobe Analysis ◽

Electron Microprobe Analysis ◽

Reactive Magnetron ◽

X Ray ◽

Infra Red

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Electron microprobe analysis of thin films with reference to “semi-thin” deposits (0.5–1 μm) of Cdx Hg1−x Te

Vacuum ◽

10.1016/s0042-207x(76)80052-8 ◽

1976 ◽

Vol 26 (4-5) ◽

pp. 214

Keyword(s):

Thin Films ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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An Electron Microprobe Analysis of Cu2−x Layers Chemiplated on Single Crystals and Thin Films of CdS

10.1007/978-3-662-24778-5_75 ◽

1969 ◽

pp. 447-457

Author(s):

M. Fabbricotti ◽

A. v. Aerschodt ◽

J. J. Loferski ◽

K. K. Reinhartz ◽

A. P. v. Rosenstiel ◽

...

Keyword(s):

Thin Films ◽

Single Crystals ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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Quantitative electron microprobe analysis of thin films on substrates with a new Monte Carlo simulation

Journal of Applied Physics ◽

10.1063/1.332127 ◽

1983 ◽

Vol 54 (2) ◽

pp. 1110-1114 ◽

Cited By ~ 23

Author(s):

Kenji Murata ◽

Masatoshi Kotera ◽

Koichi Nagami

Keyword(s):

Thin Films ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis

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