A four‐phase complex refractive index model of ion‐implantation damage: Optical constants of phosphorus implants in silicon
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1982 ◽
Vol 129
(3)
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pp. 606-609
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2008 ◽
Vol 56
(5)
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pp. 715-727
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2021 ◽
2020 ◽
Vol 242
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pp. 106735