Radio frequency ion source operated with field effect transistor based radio frequency system

2010 ◽  
Vol 81 (2) ◽  
pp. 02B107 ◽  
Author(s):  
A. Ando ◽  
A. Komuro ◽  
T. Matsuno ◽  
K. Tsumori ◽  
Y. Takeiri
2012 ◽  
Vol 83 (2) ◽  
pp. 02A731
Author(s):  
N. Tanaka ◽  
T. Matsuno ◽  
T. Funaoi ◽  
A. Ando ◽  
Y. Tauchi ◽  
...  

2013 ◽  
Vol 103 (14) ◽  
pp. 143102 ◽  
Author(s):  
Katsuhiko Nishiguchi ◽  
Hiroshi Yamaguchi ◽  
Akira Fujiwara ◽  
Herre S. J. van der Zant ◽  
Gary A. Steele

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