Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28∕Si30 isotope superlattices with sub-nanometer spatial resolution

2009 ◽  
Vol 106 (7) ◽  
pp. 076102 ◽  
Author(s):  
Yasuo Shimizu ◽  
Yoko Kawamura ◽  
Masashi Uematsu ◽  
Kohei M. Itoh ◽  
Mitsuhiro Tomita ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Three Dimensional ◽  
Atom Probe ◽  
Probe Microscopy ◽  
Silicon Isotopes ◽  
Dimensional Distribution

Doping Profile Measurements in a 65-nm Commercial Product Using Atom Probe Tomography

2008 ◽  
Author(s):  
Lev Klibanov ◽  
Dick James ◽  
Dieter Isheim
Keyword(s):  
Spatial Resolution ◽  
Atom Probe Tomography ◽  
Doping Concentration ◽  
Semiconductor Industry ◽  
Three Dimensional ◽  
Atom Probe ◽  
Doping Profile ◽  
Commercial Product ◽  
Microscopy Technique ◽  
Compositional Information

Abstract Doping profile measurements in extremely small features like transistor gates or source/drain regions is a challenging task for the semiconductor industry. In our article, we successfully used an atom probe tomography (APT) tool to measure the doping concentration and profile of the dopant elements in a commercial 65 nm product. APT not only delivers doping concentrations but also gives the highest spatial resolution (sub-1 nm) three-dimensional compositional information of any microscopy technique.

Efficient sampling for three-dimensional atom probe microscopy data

2003 ◽  
Vol 95 ◽  
pp. 199-205 ◽  
Author(s):  
Olof C. Hellman ◽  
John Blatz du Rivage ◽  
David N. Seidman
Keyword(s):  
Three Dimensional ◽  
Atom Probe ◽  
Probe Microscopy ◽  
Efficient Sampling ◽  
Microscopy Data

Application software for data analysis for three-dimensional atom probe microscopy

2002 ◽  
Vol 327 (1) ◽  
pp. 29-33 ◽  
Author(s):  
Olof Hellman ◽  
Justin Vandenbroucke ◽  
John Blatz du Rivage ◽  
David N Seidman
Keyword(s):  
Data Analysis ◽  
Three Dimensional ◽  
Atom Probe ◽  
Application Software ◽  
Probe Microscopy

Three Dimensional materials characterisation at ultrahigh resolution using a position-sensitive atom probe

1990 ◽  
Vol 48 (4) ◽  
pp. 408-409
Author(s):  
R A D Mackenzie ◽  
G D W Smith ◽  
A Cerezo ◽  
T J Godfrey ◽  
J.E. Brown
Keyword(s):  
High Resolution ◽  
Spatial Resolution ◽  
Spatial Information ◽  
Three Dimensional ◽  
Atom Probe ◽  
Sensitive Detector ◽  
Channel Plate ◽  
Position Sensitive ◽  
20 Nm ◽  
Very High

The conventional atom probe field ion microscope permits very high resolution chemical information to be determined with a lateral spatial resolution of typically 2 nm. This spatial resolution is determined by the need to define the analysis area using an aperture. A recent development, the position sensitive atom probe (POSAP), has largely removed this limitation. In a conventional atom probe the ions passing through the aperture, which have come from a circular area of the order of 2 nm in diameter, travel along a long flight path where the mass to charge ratios are determined with high precision. In the position sensitive atom probe the aperture assembly, long flight tube and ion detector (a channel plate) are replaced with a position sensitive detector held at a known distance from the specimen surface. This detector consists of two parts, a channel plate component which permits the flight times (and hence mass to charge ratios) to be determined, and a wedge and strip anode which permits the position of the incoming ion to be calculated. This arrival position corresponds directly to the position on the specimen from which the ion came. The total field of view of the POSAP is a disc approximately 20 nm in diameter. With a conventional atom probe the data acquired during the evaporation sequence can be considered as a core extracted from the specimen, where the average composition as a function of depth is known. The position sensitive atom probe permits us to record data from a much wider core (20 nm rather than 2 nm in diameter), and also to retain the spatial information within the core. As the evaporation proceeds the two dimensional information yielded by the position sensitive detector builds up into a three dimensional block of data. We have, therefore, both chemical and spatial information in three dimensions at very high resolution from the sampled volume of material.

Origin of the spatial resolution in atom probe microscopy

2009 ◽  
Vol 95 (3) ◽  
pp. 034103 ◽  
Author(s):  
Baptiste Gault ◽  
Michael P. Moody ◽  
Frederic de Geuser ◽  
Daniel Haley ◽  
Leigh T. Stephenson ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Atom Probe ◽  
Probe Microscopy

scholarly journals Three-dimensional Investigation of Ceramic/Metal Heterophase Interfaces by Atom-probe Microscopy

2000 ◽  
Vol 6 (5) ◽  
pp. 445-451 ◽  
Author(s):  
Järg Rüsing ◽  
Jason T. Sebastian ◽  
Olof C. Hellman ◽  
David N. Seidman
Keyword(s):  
Three Dimensional ◽  
Atom Probe ◽  
New Approach ◽  
Probe Microscopy

AbstractThe results of a three-dimensional atom probe (3DAP) analysis, on a subnanometer scale, of a ceramic/metal heterophase interface, MgO/Cu, are presented. Segregation of Ag, from the Cu (Ag) matrix, at MgO/Cu interfaces is investigated and the Gibbsian interfacial excess of silver is determined; the range is 2.33 × 1018 to 5.81 × 1018 m−2. Also, silver segregation at the same MgO/Cu interfaces is analyzed employing a new approach that utilizes a proximity histogram or proxigram.

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