Detection of small concentrations of N2+ in the atmosphere by a laser scattering technique

1976 ◽  
Vol 47 (4) ◽  
pp. 1519-1522 ◽  
Author(s):  
Jerry E. Solomon ◽  
Dennis M. Silva
Keyword(s):  
Laser Scattering ◽  
Scattering Technique

Improved Defect Classification Techniques of a Laser Scattering Detection System for Post CMP Silicon Dioxide Wafers

2007 ◽  
Vol 991 ◽  
Author(s):  
Daniel Mateja ◽  
Toshi Kasai ◽  
Michael Denham ◽  
Haresh Siriwardane
Keyword(s):  
Light Scattering ◽  
Silicon Dioxide ◽  
Laser Light ◽  
Detection System ◽  
Incident Beam ◽  
Experimental Conditions ◽  
Laser Scattering ◽  
Scattering Geometry ◽  
Scattering Technique ◽  
Light Scattering Technique

ABSTRACTA laser light scattering technique was used for the identification of defects on silicon dioxide (SiO2) wafers polished with a tungsten CMP slurry. Defects were then classified as scratches and particles using scanning electron microscopy (SEM). The effects of the incident beam illumination and scattering geometry on the defect detection are examined. Appropriate experimental conditions for selective detection of scratches and particles are discussed in conjunction with the estimated defect count and fractional ratio for specific defect types and sizes. The findings are qualitatively consistent with predicted light scattering distributions simulated from silicon bare substrates.

Determination of solubilities of polymers in solvents by a laser scattering technique

1999 ◽  
Vol 158-160 ◽  
pp. 847-855 ◽  
Author(s):  
Kenji Ochi ◽  
Tohru Saito ◽  
Kazuo Kojima
Keyword(s):  
Laser Scattering ◽  
Scattering Technique

The formation of blood sediment at low hematocrit: a kinetic study by a laser scattering technique

2004 ◽  
Author(s):  
Bronislaw Grzegorzewski ◽  
A. Gornicki ◽  
S. Czarnecki ◽  
A. Gutsze
Keyword(s):  
Kinetic Study ◽  
Laser Scattering ◽  
Scattering Technique

Laser scattering technique to characterize turbulent liquid

Optifab 2017 ◽  
2017 ◽  
Author(s):  
Aissa Manallah ◽  
Mohamed Bouafia ◽  
Malika Lakhal
Keyword(s):  
Laser Scattering ◽  
Scattering Technique
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