Tunable in situ growth of porous cubic silicon carbide thin films via methyltrichlorosilane-based chemical vapor deposition

2009 ◽  
Vol 95 (10) ◽  
pp. 101901 ◽  
Author(s):  
Wei-Cheng Lien ◽  
Nicola Ferralis ◽  
Albert P. Pisano ◽  
Carlo Carraro ◽  
Roya Maboudian
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
In Situ Growth ◽  
Cubic Silicon Carbide

In Situ Growth Monitoring During Metalorganic Chemical Vapor Deposition of YBa 2Cu 3Ox Thin Films by Spectroscopic Ellipsometry

1999 ◽  
Vol 38 (Part 2, No. 6A/B) ◽  
pp. L632-L635 ◽  
Author(s):  
Shuu'ichirou Yamamoto ◽  
Satoshi Sugai ◽  
Yasunari Matsukawa ◽  
Akio Sengoku ◽  
Hiroshi Tobisaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Monitoring ◽  
In Situ Growth ◽  
Metalorganic Chemical

In situ growth of MgB/sub 2/ thin films by hybrid physical-chemical vapor deposition

2003 ◽  
Vol 13 (2) ◽  
pp. 3233-3237 ◽  
Author(s):  
X.X. Xi ◽  
X.H. Zeng ◽  
A.V. Pogrebnyakov ◽  
S.Y. Xu ◽  
Q. Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
In Situ Growth ◽  
Physical Chemical

ChemInform Abstract: In situ Growth of Epitaxial YAlO3 Thin Films by Metal-Organic Chemical Vapor Deposition.

ChemInform ◽  
2010 ◽  
Vol 24 (15) ◽  
pp. no-no
Author(s):  
B. HAN ◽  
D. A. NEUMAYER ◽  
D. L. SCHULZ ◽  
B. J. HINDS ◽  
T. J. MARKS ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
In Situ Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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