Influence of Hydrogen Plasma Treatment Time to Si:H Layer Deposition Time Ratio on the Properties of Layer-by-Layer Deposited Hydrogenated Silicon (Si:H) Thin Films

2009 ◽  
Author(s):  
Goh Boon Tong ◽  
Siti Meriam Ab. Gani ◽  
Muhamad Rasat Muhamad ◽  
Saadah Abdul Rahman ◽  
Swee-Ping Chia ◽  
...  
1997 ◽  
Vol 71 (23) ◽  
pp. 3403-3405 ◽  
Author(s):  
K. Saitoh ◽  
M. Kondo ◽  
M. Fukawa ◽  
T. Nishimiya ◽  
A. Matsuda ◽  
...  

2009 ◽  
Vol 23 (06n07) ◽  
pp. 1300-1305
Author(s):  
KI-HO SONG ◽  
HYUN-YONG LEE ◽  
HOE-YOUNG YANG ◽  
SUNG-WON KIM ◽  
JAE-HEE SEO ◽  
...  

Two-dimensional photonic crystals (2D-PCs) with Ge 2 Sb 2 Te 5 ( GST ) nanohole arrays were prepared by the nanosphere lithography (NSL) process. A primary factor of PCs is that the refractive index (n) and the n-modulation can be realized by using the GST films, which exhibit a reversible phase transformation between amorphous and crystalline states by laser illumination. The polystyrene (PS) spheres with a diameter of 500 nm were spin-coated on Si substrate and subsequently reduced by O 2-plasma treatment. The reduced spheres were utilized as a lift-off mask of the NSL process and their size and separation could be precisely controlled. Amorphous GST films were thermally evaporated and then the reduced PS spheres were removed. The fabricated GST nanohole arrays were observed by SEM and AFM. The nanohole diameters are nearly linearly reduced with increasing plasma-treatment time (t). The reduction rate (δ) for the conditions of this work was evaluated to be ~ 0.92 nm/s. The period (Λ) and filling factor (η) of PCs are structure parameters that determine their photonic bandgaps (PBGs). η-modulation can be easily achieved via a control of t and the Λ can be also modulated by the use of PS spheres with specific diameter. In addition, the PBGs for the fabricated GST 2 D PC were calculated by considering the amorphous and crystalline states of GST .


2012 ◽  
Vol 499 ◽  
pp. 90-94 ◽  
Author(s):  
Jin Yun Xu ◽  
Wen Yu Wang ◽  
Xin Jin

To improve the adhesion between ultra-high-molecular-weight polyethylene (UHMWPE) fibers and matrix, the UHMWPE fibers were treated by low temperature argon-plasma. The effects of argon-plasma treatment on the properties of UHMWPE have been investigated. The roughness and wetting ability were all found to increase significantly after modifications. The tensile strength of UHMWE fibers were decreased with the plasma treatment time. The optimum plasma treatment is 2min.The increasing of roughness and wetting ability of UHMWPE fiber are beneficial to the improvement the adhesion between UHMWPE fiber and matrix.


Coatings ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 580
Author(s):  
Chao-Ching Chiang ◽  
Philip Nathaniel Immanuel ◽  
Yi-Hsiung Chiu ◽  
Song-Jeng Huang

In this work we report on a rapid, easy-to-operate, lossless, room temperature heterogeneous H2O plasma treatment process for the bonding of poly(methyl methacrylate) (PMMA) and double-sided polished (DSP) silicon substrates by for utilization in sandwich structured microfluidic devices. The heterogeneous bonding of the sandwich structure produced by the H2O plasma is analyzed, and the effect of heterogeneous bonding of free radicals and high charge electrons (e−) in the formed plasma which causes a passivation phenomenon during the bonding process investigated. The PMMA and silicon surface treatments were performed at a constant radio frequency (RF) power and H2O flow rate. Changing plasma treatment time and powers for both processes were investigated during the experiments. The gas flow rate was controlled to cause ionization of plasma and the dissociation of water vapor from hydrogen (H) atoms and hydroxyl (OH) bonds, as confirmed by optical emission spectroscopy (OES). The OES results show the relative intensity peaks emitted by the OH radicals, H and oxygen (O). The free energy is proportional to the plasma treatment power and gas flow rate with H bonds forming between the adsorbed H2O and OH groups. The gas density generated saturated bonds at the interface, and the discharge energy that strengthened the OH-e− bonds. This method provides an ideal heterogeneous bonding technique which can be used to manufacture new types of microfluidic devices.


2008 ◽  
Vol 53 (9(5)) ◽  
pp. 2540-2543 ◽  
Author(s):  
Hooyoung Song ◽  
Jae-Hoon Kim ◽  
EunKyu Kim ◽  
Jaehwan Ha ◽  
JinPyo Hong ◽  
...  

Metals ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 991 ◽  
Author(s):  
Masoud Shekargoftar ◽  
Jana Jurmanová ◽  
Tomáš Homola

Organic-inorganic halide perovskite materials are considered excellent active layers in the fabrication of highly efficient and low-cost photovoltaic devices. This contribution demonstrates that rapid and low-temperature air-plasma treatment of mixed organic-inorganic halide perovskite film is a promising technique, controlling its opto-electrical surface properties by changing the ratio of organic-to-inorganic components. Plasma treatment of perovskite films was performed with high power-density (25 kW/m2 and 100 W/cm3) diffuse coplanar surface barrier discharge (DCSBD) at 70 °C in ambient air. The results show that short plasma treatment time (1 s, 2 s, and 5 s) led to a relatively enlargement of grain size, however, longer plasma treatment time (10 s and 20 s) led to an etching of the surface. The band-gap energy of the perovskite films was related to the duration of plasma treatment; short periods (≤5 s) led to a widening of the band gap from ~1.66 to 1.73 eV, while longer exposure (>5 s) led to a narrowing of the band gap to approx. 1.63 eV and fast degradation of the film due to etching. Surface analysis demonstrated that the film became homogeneous, with highly oriented crystals, after short plasma treatment; however, prolonging the plasma treatment led to morphological disorders and partial etching of the surface. The plasma treatment approach presented herein addresses important challenges in current perovskite solar cells: tuning the optoelectronic properties and manufacturing homogeneous perovskite films.


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