Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope

2009 ◽  
Vol 80 (7) ◽  
pp. 073706 ◽  
Author(s):  
Byung Seon Chun ◽  
Kwangsoo Kim ◽  
Daegab Gweon
Keyword(s):  
Three Dimensional ◽  
Surface Profile ◽  
Confocal Microscope ◽  
Profile Measurement ◽  
Beam Scanning ◽  
Dimensional Surface ◽  
Surface Profile Measurement

scholarly journals Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront Sensor

2012 ◽  
Vol 21 (3) ◽  
pp. 530-540 ◽  
Author(s):  
Chenhui Li ◽  
Gunnsteinn Hall ◽  
Difeng Zhu ◽  
Heng Li ◽  
Kevin W. Eliceiri ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Surface Profile ◽  
Wavefront Sensor ◽  
Profile Measurement ◽  
Dimensional Surface ◽  
Surface Profile Measurement
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