Microcantilever array with embedded metal oxide semiconductor field effect transistor actuators for deflection control, deflection sensing, and high frequency oscillation
1998 ◽
Vol 16
(2)
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pp. 850-854
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1969 ◽
Vol 116
(5)
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pp. 699
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2013 ◽
Vol 24
(2)
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pp. 259-267
Keyword(s):
2021 ◽
Vol 134
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pp. 106046
Keyword(s):
2020 ◽
Vol 21
(3)
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pp. 339-347
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1997 ◽
Vol 9
(8)
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pp. 1143-1145
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