Comparative study of the role of the nucleation stage on the final crystalline quality of (111) and (100) silicon carbide films deposited on silicon substrates.
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2008 ◽
Vol 600-603
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pp. 231-234
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2019 ◽
Vol 127
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pp. 63-67
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2019 ◽
Vol 518
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pp. 022085
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2017 ◽
Vol 10
(1)
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pp. 28-30
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2020 ◽
Vol 32
(3)
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pp. 571-609
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2015 ◽
Vol 22
(2)
◽
pp. 501
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