In situ x-ray photoelectron spectroscopy analysis of SiOxFy passivation layer obtained in a SF6/O2 cryoetching process

2009 ◽  
Vol 94 (7) ◽  
pp. 071501 ◽  
Author(s):  
J. Pereira ◽  
L. E. Pichon ◽  
R. Dussart ◽  
C. Cardinaud ◽  
C. Y. Duluard ◽  
...  
2016 ◽  
Vol 55 (8S2) ◽  
pp. 08PC02 ◽  
Author(s):  
Antonio T. Lucero ◽  
Young-Chul Byun ◽  
Xiaoye Qin ◽  
Lanxia Cheng ◽  
Hyoungsub Kim ◽  
...  

2019 ◽  
Vol 682 ◽  
pp. 142-146 ◽  
Author(s):  
R. Garza-Hernández ◽  
A. Carrillo-Castillo ◽  
V.H. Martínez-Landeros ◽  
M.A. Martínez-Puente ◽  
E. Martínez-Guerra ◽  
...  

2022 ◽  
Vol 40 (1) ◽  
pp. 010808
Author(s):  
Sungun Wi ◽  
Vaithiyalingam Shutthanandan ◽  
Bhuvaneswari M. Sivakumar ◽  
Suntharampillai Thevuthasan ◽  
Venkateshkumar Prabhakaran ◽  
...  

2021 ◽  
Vol 4 (1) ◽  
Author(s):  
Marc Benjamin Hahn ◽  
Paul M. Dietrich ◽  
Jörg Radnik

AbstractIonizing radiation damage to DNA plays a fundamental role in cancer therapy. X-ray photoelectron-spectroscopy (XPS) allows simultaneous irradiation and damage monitoring. Although water radiolysis is essential for radiation damage, all previous XPS studies were performed in vacuum. Here we present near-ambient-pressure XPS experiments to directly measure DNA damage under water atmosphere. They permit in-situ monitoring of the effects of radicals on fully hydrated double-stranded DNA. The results allow us to distinguish direct damage, by photons and secondary low-energy electrons (LEE), from damage by hydroxyl radicals or hydration induced modifications of damage pathways. The exposure of dry DNA to x-rays leads to strand-breaks at the sugar-phosphate backbone, while deoxyribose and nucleobases are less affected. In contrast, a strong increase of DNA damage is observed in water, where OH-radicals are produced. In consequence, base damage and base release become predominant, even though the number of strand-breaks increases further.


2021 ◽  
pp. 150898
Author(s):  
Makoto Takayanagi ◽  
Takashi Tsuchiya ◽  
Shigenori Ueda ◽  
Tohru Higuchi ◽  
Kazuya Terabe

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