Silver-induced layer exchange for the low-temperature preparation of intrinsic polycrystalline silicon films

2009 ◽  
Vol 94 (1) ◽  
pp. 012108 ◽  
Author(s):  
M. Scholz ◽  
M. Gjukic ◽  
M. Stutzmann
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Low Temperature Preparation ◽  
Polycrystalline Silicon Films ◽  
Temperature Preparation

scholarly journals Low Temperature Growth of Polycrystalline Silicon Films by RF Sputtering Method(1st Report).

1995 ◽  
Vol 61 (6) ◽  
pp. 829-833
Author(s):  
Hiroaki KAKIUCHI ◽  
Hideaki KAWABE ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Akihiro TAKEUCHI ◽  
...  
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Rf Sputtering ◽  
Silicon Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Films

Effects of the Addition ofSiF4to theSiH4Feed Gas for Depositing Polycrystalline Silicon Films at Low Temperature

1997 ◽  
Vol 36 (Part 1, No. 11) ◽  
pp. 6625-6632 ◽  
Author(s):  
Moniruzzaman Syed ◽  
Takao Inokuma ◽  
Yoshihiro Kurata ◽  
Seiichi Hasegawa
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films
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