Depth Profiling of N and C in Ion Implanted ZnO and Si Using Deuterium Induced Nuclear Reaction Analysis
2005 ◽
Vol 232
(1-4)
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pp. 280-284
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2000 ◽
Vol 18
(1)
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pp. 489
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Keyword(s):
Keyword(s):
2000 ◽
Vol 161-163
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pp. 997-1001
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2011 ◽
Vol 294
(3)
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pp. 401-404
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2012 ◽
Vol 323-325
◽
pp. 221-226
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