Metal Ion Sources for Ion Beam Implantation

2008 ◽  
Author(s):  
W. J. Zhao ◽  
Z. Q. Zhao ◽  
X. T. Ren ◽  
Edmund G. Seebauer ◽  
Susan B. Felch ◽  
...  
Keyword(s):  
Metal Ion ◽  
Ion Beam ◽  
Ion Sources ◽  
Ion Beam Implantation

Dy–Ni alloy metal ion source for focused ion beam implantation

Vacuum ◽  
2002 ◽  
Vol 67 (2) ◽  
pp. 249-251 ◽  
Author(s):  
A Melnikov ◽  
M Hillmann ◽  
I Kamphausen ◽  
W Oswald ◽  
P Stauche ◽  
...  
Keyword(s):  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Ni Alloy ◽  
Ion Beam Implantation ◽  
Alloy Metal

ENERGY DISTRIBUTION OF ION BEAM FROM VARIOUS LIQUID METAL ION SOURCES

1987 ◽  
Vol 48 (C6) ◽  
pp. C6-147-C6-152 ◽  
Author(s):  
H. Arimoto ◽  
E. Miyauchi ◽  
H. Hashimoto ◽  
M. Komuro
Keyword(s):  
Liquid Metal ◽  
Energy Distribution ◽  
Metal Ion ◽  
Ion Beam ◽  
Ion Sources

Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources

1999 ◽  
Vol 17 (6) ◽  
pp. 2791 ◽  
Author(s):  
L. C. Chao ◽  
B. K. Lee ◽  
C. J. Chi ◽  
J. Cheng ◽  
I. Chyr ◽  
...  
Keyword(s):  
Rare Earth ◽  
Liquid Alloy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Sources ◽  
Ion Beam Implantation

Development of Liquid‐Metal‐Ion Sources for Focused‐Ion‐Beam Applications

1989 ◽  
Vol 136 (11) ◽  
pp. 3502-3505 ◽  
Author(s):  
T. Ishitani ◽  
K. Umemura ◽  
Y. Kawanami ◽  
T. Ohnishi
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Sources

Nonlinear optical waveguides produced by MeV metal ion-beam implantation of lithium niobate

1998 ◽  
Author(s):  
Sergey S. Sarkisov ◽  
Eric K. Williams ◽  
Michael J. Curley ◽  
Dariush Ila ◽  
Vasili L. Svetchnikov ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Optical Waveguides ◽  
Metal Ion ◽  
Nonlinear Optical ◽  
Ion Beam ◽  
Ion Beam Implantation

ENERGY SPREADS IN FIELD EVAPORATION AND LIQUID-METAL ION SOURCES

1984 ◽  
Vol 45 (C9) ◽  
pp. C9-179-C9-182
Author(s):  
G. L.R. Mair ◽  
T. Mulvey ◽  
R. G. Forbes
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Ion Sources ◽  
Field Evaporation
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