Implementation on a desktop computer of the real time feedback control loop of a scanning probe microscope

2008 ◽  
Vol 79 (11) ◽  
pp. 113702 ◽  
Author(s):  
G. Aloisi ◽  
F. Bacci ◽  
M. Carlà ◽  
D. Dolci ◽  
L. Lanzi
Keyword(s):  
Feedback Control ◽  
Real Time ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Control Loop ◽  
Desktop Computer ◽  
The Real ◽  
Probe Microscope

XYZ-Stage for Scanning Probe Microscope by Using Parallel Mechanism

1999 ◽  
Author(s):  
Koshiro Yamakawa ◽  
Katsushi Furutani ◽  
Naotake Mohri
Keyword(s):  
Feedback Control ◽  
Parallel Mechanism ◽  
Degrees Of Freedom ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Link Length ◽  
Motion Error ◽  
Positioning Device ◽  
Probe Microscope ◽  
Induced Charge

Abstract This paper deals with a xyz-stage for a scanning probe microscope (SPM) by using a parallel mechanism with 6 degrees of freedom Multilayer piezos are used to change the link length in the prototype. The movable range of the prototype is 100μm in the x- and y- directions and 10μm in the z- directions. The resonant frequency of the prototype is approximately 100 Hz in the x- and y- direction and approximately 50 Hz in the z- direction. The motion of the stage is controlled by the induced charge feedback control to allow compact SPM designs. The motion error is 16 nm in the z- direction by the induced charge feedback control. The displacement of the prototype can be controlled by the induced charge feedback control as well as by the displacement feedback control. This stage is applied to a positioning device of an atomic force microscope (AFM). The grooves of the diffraction grating are observed with good linearity with the AFM. The prototype can be used for the positioning device of the AFM.

Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

1994 ◽  
Vol 52 ◽  
pp. 1068-1069
Author(s):  
S. P. Sapers ◽  
R. Clark ◽  
P. Somerville
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Control ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
List Type ◽  
Manufacturing Environment ◽  
Physical Measurements ◽  
Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

Proposal of a Technique to Detect Subsurface Hot Electrons with a Scanning Probe Microscope

1996 ◽  
Vol 35 (Part 1, No. 2B) ◽  
pp. 1306-1310
Author(s):  
Francisco Vazquez ◽  
Kazuhito Furuya ◽  
Daisuke Kobayashi
Keyword(s):  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Hot Electrons ◽  
Probe Microscope
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