High brightness extreme ultraviolet (at 13.5 nm) emission from time-of-flight controlled discharges with coaxial fuel injection
2019 ◽
Vol 33
(14)
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pp. 1196-1206
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2016 ◽
Vol 139
(4)
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Keyword(s):
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2016 ◽
Vol 87
(10)
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pp. 103304
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