High-mobility microcrystalline silicon thin-film transistors prepared near the transition to amorphous growth

2008 ◽  
Vol 104 (5) ◽  
pp. 054506 ◽  
Author(s):  
Kah-Yoong Chan ◽  
Dietmar Knipp ◽  
Aad Gordijn ◽  
Helmut Stiebig
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Mobility ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Contact Effects in High Mobility Microcrystalline Silicon Thin-Film Transistors

2007 ◽  
Vol 989 ◽  
Author(s):  
Kah Yoong Chan ◽  
Eerke Bunte ◽  
Helmut Stiebig ◽  
Dietmar Knipp
Keyword(s):  
Thin Film ◽  
Threshold Voltage ◽  
Thin Film Transistors ◽  
High Mobility ◽  
Chemical Vapor ◽  
Channel Length ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Short Channel ◽  
Long Channel

AbstractMicrocrystalline silicon (mc-Si:H) has recently been proven to be a promising material for thin-film transistors (TFTs). We present mc-Si:H TFTs fabricated by plasma-enhanced chemical vapor deposition at temperatures below 200°C in a condition similar to the fabrication of amorphous silicon TFTs. The mc-Si:H TFTs exhibit device mobilities exceeding 30 cm2/Vs and threshold voltages in the range of 2.5V. Such high mobilities are observed for long channel devices (50-200 mm). For short channel device (2 mm), the mobility reduces to 7 cm2/Vs. Furthermore the threshold voltage of the TFTs decreases with decreasing channel length. A simple model is developed, which explains the observed reduction of the device mobility and threshold voltage with decreasing channel length by the influence of drain and source contacts.

Thin-film inverters based on high mobility microcrystalline silicon thin-film transistors

2008 ◽  
Vol 52 (6) ◽  
pp. 914-918 ◽  
Author(s):  
Kah-Yoong Chan ◽  
Eerke Bunte ◽  
Dietmar Knipp ◽  
Helmut Stiebig
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Mobility ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Electrical Stability of High-Mobility Microcrystalline Silicon Thin-Film Transistors

2012 ◽  
Vol 8 (1) ◽  
pp. 27-34 ◽  
Author(s):  
Anita Risteska ◽  
Kah-Yoong Chan ◽  
Aad Gordijn ◽  
Helmut Stiebig ◽  
Dietmar Knipp
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Mobility ◽  
Microcrystalline Silicon ◽  
Electrical Stability ◽  
Silicon Thin Film

Influence of the deposition temperature on the performance of microcrystalline silicon thin film transistors

2008 ◽  
Vol 52 (3) ◽  
pp. 432-435 ◽  
Author(s):  
Maher Oudwan ◽  
Alexey Abramov ◽  
Pere Roca i Cabarrocas ◽  
François Templier
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Deposition Temperature ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Low temperature processed p-type bottom gate microcrystalline silicon thin film transistors

2010 ◽  
pp. NA-NA
Author(s):  
O. Moustapha ◽  
A. Abramov ◽  
D. Daineka ◽  
M. Oudwan ◽  
Y. Bonnassieux ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
P Type ◽  
Bottom Gate

scholarly journals Investigation on stability of microcrystalline silicon thin film transistors

2006 ◽  
Vol 55 (12) ◽  
pp. 6612
Author(s):  
Li Juan ◽  
Wu Chun-Ya ◽  
Zhao Shu-Yun ◽  
Liu Jian-Ping ◽  
Meng Zhi-Guo ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

n+-doped-layer-free microcrystalline silicon thin film transistors fabricated with the CuMg as source/drain metal

2007 ◽  
Vol 91 (2) ◽  
pp. 022113 ◽  
Author(s):  
M. C. Wang ◽  
T. C. Chang ◽  
Po-Tsun Liu ◽  
R. W. Xiao ◽  
L. F. Lin ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Microcrystalline silicon and excimer laser crystallized silicon Thin Film Transistors on the same substratel

2007 ◽  
Vol 515 (19) ◽  
pp. 7585-7589 ◽  
Author(s):  
T. Pier ◽  
K. Kandoussi ◽  
C. Simon ◽  
N. Coulon ◽  
H. Lhermite ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Modelling of contact effects in microcrystalline silicon thin-film transistors

2009 ◽  
Vol 96 (3) ◽  
pp. 751-758
Author(s):  
Kah-Yoong Chan ◽  
Elias Hashem ◽  
Aad Gordijn ◽  
Helmut Stiebig ◽  
Dietmar Knipp
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Contact Effects
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