High-energy proton generation from thin-foil targets with a high-intensity ultra-short pulse laser

2008 ◽  
Author(s):  
Akito Sagisaka ◽  
Hiroyuki Daido ◽  
Akifumi Yogo ◽  
Koichi Ogura ◽  
Satoshi Orimo ◽  
...  
2007 ◽  
Vol 122-123 ◽  
pp. 318-321
Author(s):  
Lilia C. Courrol ◽  
Everson B. dos Santos ◽  
Ricardo E. Samad ◽  
Izilda M. Ranieri ◽  
Laércio Gomes ◽  
...  

Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


1994 ◽  
Author(s):  
Ronnie Shepherd ◽  
Rex Booth ◽  
Dwight Price ◽  
Rosemary Walling ◽  
Richard More ◽  
...  

2005 ◽  
Author(s):  
Andreas Hertwig ◽  
Sven Martin ◽  
Wolfgang Kautek ◽  
Jörg Krüger

Sign in / Sign up

Export Citation Format

Share Document